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Modular, Versatile Point of use Scrubber





INFORMAZIONI

Orizontal and vertical Scrubbers.
Manufactured fromcorrosionresistantplasticsuchasPVC
CPVC, PVDF, POLYPROPYLENE, FRP, CORZAN.
For Semiconductors & Nano Technology Industry
- Gas% efficency
- CL2 = 99.999
- HCI = 99.999
- SiCL4 = 99.998
Patent No.:US6,592,659,B2
- BCL3 = 99.998
Patent No.:IT01318093
- SiH2CL3 = 99.999
- SiHCl3 = 99.999
- HF = 99.997
- TEOS = 99.998
- NH3 = 99.998
- NAOH = 99.989
- Custom Fabrication.
- Low Maintenance desigh.
- CE certificates available
Patent No.:US6,592,659,B2

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